CONTAMINATION PREVENTION DEVICE FOR EXTREME ULTRA-VIOLET (EUV) RETICLE AND EUV EXPOSURE APPARATUS INCLUDING THE SAME
Invented by KIM; Hoonseop, NAM; Sangki, JANG; Sungho, MUN; Jehoi, YOO; Nali, LEE; Changwook, SAMSUNG ELECTRONICS CO., LTD. Keeping semiconductor…